Last edited by Ferisar
Friday, July 24, 2020 | History

4 edition of Sputtering by Particle Bombardment found in the catalog.

Sputtering by Particle Bombardment

R. Behrisch

Sputtering by Particle Bombardment

Sputtering of Alloys and Compounds , Electron and Neutron Sputtering, Surf. (Topics in Applied Physics)

by R. Behrisch

  • 85 Want to read
  • 29 Currently reading

Published by Springer .
Written in English

    Subjects:
  • Particle Physics,
  • Solid State Physics,
  • Science,
  • Effect of radiation on,
  • Solids,
  • Sputtering (Physics),
  • Surfaces (Physics)

  • The Physical Object
    FormatHardcover
    Number of Pages385
    ID Numbers
    Open LibraryOL10151979M
    ISBN 100387125930
    ISBN 109780387125930

    In physics, sputtering is a phenomenon in which microscopic particles of a solid material are ejected from its surface, after the material is itself bombarded by energetic particles of a plasma or gas. It occurs naturally in outer space, and can be an unwelcome source of wear in precision components. However, the fact that it can be made to act on extremely fine layers of material is utilised. Download Sputtering by Particle Bombardment: Experiments and Computer Calculations from Threshold to MeV Energies or any other file from Books category. HTTP download also .

    Get this from a library! Sputtering by particle bombardment / 1, Physical sputtering of single-element solids. In Fig. 2, we show the distribution of clusters obtained on the average during cluster sputtering after t=20 ps. The data are shown in Fig. 2 in a double-logarithmic plot to test whether they follow a polynomial decay, (1) Y(n)∝n −α. We note that such a decay has been found both in experiment and simulation for sputtering of metals from plane surfaces, even though a theoretical foundation Cited by:

    Removal of surface material (atoms, clusters and molecules) by particle bombardment. Source: PAC, , 51, (General aspects of trace analytical methods—IV.   Author of Sputtering by particle bombardment, Ion Beam Technology, Sputtering by Particle Bombardment III.


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Sputtering by Particle Bombardment by R. Behrisch Download PDF EPUB FB2

This volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The most important quantities are the sputtering yields, i.e. t Sputtering by Particle Bombardment Experiments and Computer Calculations from Threshold to MeV Energies.

About this book. : Sputtering by Particle Bombardment: Experiments and Computer Calculations from Threshold to MeV Energies (Topics in Applied Physics) Format: Hardcover. Sputtering by Particle Bombardment II (Topics in Applied Physics) Softcover reprint of the original 1st ed.

EditionFormat: Paperback. Earlier books on this subject, i.e. "Sputtering by Particle Bombardment I - III" are nearly 20 years old, but since then a lot of new and important work has been performed and published in international journals.

The planned book brings an overview about all the new results. This concerns. Earlier books on this subject, i.e. "Sputtering by Particle Bombardment I - III" are nearly 20 years old.

Since then a lot Sputtering by Particle Bombardment book new and important work has been performed and published in. Sputtering by Particle Bombardment II Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography Editors: Behrisch, R.

(Ed.). adshelp[at] The ADS is operated by the Smithsonian Astrophysical Observatory under NASA Cooperative Agreement NNX16AC86A. Sputtering by Particle Bombardment I: Physical Sputtering of Single-Element Solids, Topics in Applied Physics, Volume ISBN Springer-Verlag, Sputtering by Particle Bombardment I Physical Sputtering of Single-Element Solids.

Editors; Rainer Behrisch; Book. Sputtering by ion bombardment theoretical concepts. Peter Sigmund. Pages Back Matter.

PDF. About this book. Keywords. boundary element method concept crystal ion measurement particle solid. Bibliographic. 2 The Sputtering Yield 3 3 Distributions of Sputtered Particles 4 4 Surface Topography 4 5 Sputtering Calculations 7 Analytic Theory 7 Computer Calculations 8 6 Sputtering Measurements 9 7 Applications of Sputtering 11 8 Summary, Conclusions 12 References 12 Index 19 Computer Simulation of the Sputtering ProcessFile Size: KB.

Description: Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology.

This is the third and final volume of a comprehensive review on sputtering. The sputtering threshold is defined as the minimum kinetic energy of the bombarding particle for sputtering to occur [8].Thus, the bombarding particle must have a kinetic energy Sputtering by Particle Bombardment II: Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface TopographyCited by: Sputtering by Particle Bombardment: Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography Rainer Behrisch, Hans Henrik Andersen Springer-Verlag, - Science - pages.

Sputtering by particle bombardment. Physical sputtering of single element solids. Edited by R. BEHRISCH. Topics in Applied Physics. Vol. x + Berlin, Heidelberg, New York: Springer, Price US $, DM The most recent book discussing all the different aspects of ion bombardment of solids was published more than ten.

Sputtering by particle bombardment. Physical sputtering of single‐element solids. von R. Behrisch. Topics in applied physics, vol.

Cited by: Sputtering by particle bombardment. Berlin ; New York: Springer-Verlag, © (OCoLC) Material Type: Internet resource: Document Type: Book, Internet Resource: All Authors / Contributors: Rainer Behrisch; Hans Henrik Andersen. Sputtering by Particle Bombardment This book provides a long-needed survey of new results.

Especially welcome is a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields, which is useful for researchers who need sputtering yields for physics.

Sputtering by Particle Bombardment I: Physical Sputtering of Single-Element Solids Springer Berlin Heidelberg Rainer Behrisch (auth.), Dr. Rainer Behrisch (eds.). Sputtering by Particle Bombardment I, Vol. 47 aus: Topics in Applied Physics. Springer‐Verlag, Berlin‐Heidelberg‐New York Seiten, Preis: DM ‐.

First published: April. 2. Sputtering by Ion Bombardment: Theoretical Concepts Peter Sigmund With 24 Figures This chapter is an introduction to sputtering theory rather than a review.sputtering processes and has recently been discussed by Sproul et al. [32]. On the other hand, the enhancement of sputtering yields due to chemical effects, i.e., chemical sputtering, plays an important role in a variety of mod-ern plasma etching [33] processes for fabrication of memory and logic chips in the microelectronics industry [12].In Experimental Nuclear Physics, vol.

1, + Sputtering by Particle Bombardment 3 als Science Applications of Ion Beam The sputtering cathode will also be subject to bombardment with the reactive gascollision between a sputtered particleThin Films Fundamentals and Applications\" Download mp3 audio book.